NTT-AT's extreme ultraviolet (XUV or EUV) filters realize high-transmittance, high-stability, and long-lifetime for various EUV experiments. This premium quality filters are pinholeless, without support mesh and support film, and having oxidation protective coatings.
Premium free-standing EUV filters provided by NTT-AT is realized high transmittance and long lifetime by coating oxidation protective layers on both sides of the metal thin film.
Filter size: 10 mm * 10mm
Filter thickness: 100 nm
Holder size: diameter 28 mm
List of filters:
• Zr (for wavelength 10 – 20 nm)
• Al （for wavelength 20 – 50 nm)
• Sn/SiN （for wavelength 3 – 5 nm）
• In/SiN （for wavelength 3 – 5 nm）
The size, thickness, etc., will be customized upon request.
Example（Filter thickness: 100 nm）
In our demonstration, NTT-AT's oxide protected Al XUV filter has 2 to 5 times higher transmittance than that of conventional Al filter, at 3 months after fabrication. This XUV filters will be stably used for a long time owing to the effect of the oxidation protective coatings.