Silicon Optical Waveguide Measurement

The OCI1500 can be used to measure length, loss and other applications of a silicon optical waveguide. There are many waveguides on the 1.5*1.5cm silicon wafer which is shown in Figure 1. The  light goes through waveguide via the green gratings at both ends of waveguide. The OCI1500 is used to measure linear waveguides, linear waveguides with defect and linear waveguides with a ring structure on the silicon wafer with the spatial resolution of 10 μm.

Figure 1. Structure of waveguide
Figure 1. Structure of waveguide

Figure 2. Structure of waveguide under a microscope
Figure 2. Structure of waveguide under a microscope

The length of four waveguides is about 1cm. The loss peaks at both ends of waveguide A and B are caused by strong reflection of gratings. A loss peak at 0.5cm appears in waveguide C which can be identified as a defect (break point). The light disappears after transmitting 0.5 cm in waveguide D and it can be identified that the ring has a function of light absorption.

Figure 3 Measurement Results (A and B are linear waveguides, C is a linear waveguide with defect, and D is a linear waveguide with a ring structure)

Figure 3 Measurement Results

(A and B are linear waveguides, C is a linear waveguide with defect, and D is a linear waveguide with a ring structure)



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